HYBRID PHASE-SHIFT MASK,申请号KR20010023106-传众专利搜索

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发明名称	HYBRID PHASE-SHIFT MASK
摘要
申请公布号	KR100483513(B1)	申请公布日期	2005.04.15
申请号	KR20010023106	申请日期	2001.04.27
申请人		发明人
分类号	G03F1/34;G03F1/26;(IPC1-7):G03F1/14	主分类号	G03F1/34
代理机构		代理人
主权项
地址

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