Z-AXIS ANGULAR RATE MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS) SENSOR
摘要
An oscillatory angular rate MEMS sensor is described for sensing rotation about the "Z-axis". Embodiments are either coupled-mass tuning-fork or single oscillating-mass in nature. The sensor includes mechanical and electrical function integration, and is preferably manufactured by a unique MEMS fabrication process.
申请公布号
WO2005040715(A2)
申请公布日期
2005.05.06
申请号
WO2004US30612
申请日期
2004.09.20
申请人
KIONIX, INC.;CHOJNACKI, ERIC P.;SHEN-EPSTEIN, JUNE P.;NENADIC, NENAD;STIRLING, NATHAN L.;NISTOR, VASILE
发明人
CHOJNACKI, ERIC P.;SHEN-EPSTEIN, JUNE P.;NENADIC, NENAD;STIRLING, NATHAN L.;NISTOR, VASILE