| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a member capable of realizing cost reduction, high safety and exact control. <P>SOLUTION: In driving plasma with a bipolar pulse, a controlled DC current is bipolar-switched, with a bridge circuit consisting of a power switch constituted of an electronic semiconductor, thus producing pulses. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
