发明名称 |
Objective lens arrangement for use in a charged particle beam column |
摘要 |
An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.
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申请公布号 |
US6897442(B2) |
申请公布日期 |
2005.05.24 |
申请号 |
US20030423289 |
申请日期 |
2003.04.25 |
申请人 |
APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
PETROV IGOR |
分类号 |
G01Q30/02;H01J37/145;H01J37/28;(IPC1-7):H01J37/145;H01J37/244 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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