| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve problems that wavelength dependency and polarization dependency are increased when a mirror film for transmitting/reflecting incident light is formed of a metal film such as an Au film in a beam splitter. <P>SOLUTION: A 1st mirror film 1 having a deposition area 5 for reflecting the incident light and a non-deposition area 6 for transmitting the incident light and a 2nd mirror film 2 for reflecting the light reflected by the 1st mirror film 1 are symmetrically arranged on both sides of the beam splitter by taking the diagonal surface 11 of the beam splitter as a reference, and the 1st mirror film 1 is arranged so that the incident angle of the light may be 22.5°. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
