METHOD FOR FORMING CERAMIC COATING HAVING IMPROVED PLASMA RESISTANCE AND CERAMIC COATING FORMED THEREBY

摘要

The present invention relates to a method for forming a ceramic coating having improved plasma resistance and a ceramic coating formed thereby. The present invention discloses the method for forming the ceramic coating having improved plasma resistance and the ceramic coating formed thereby, comprising the steps of: receiving, from a powder supply portion, a plurality of ceramic powders having a first powder particle size range, and transporting the powders using a transport gas; and forming a ceramic coating in which a plurality of first ceramic particles within a first coating particle size range and a plurality of second ceramic particles within a second coating particle size range, which is larger than the first coating particle size range, by causing the transported ceramic powders to collide with a substrate inside a process chamber, at the speed of 100 to 500 m/s so as to be pulverized.

主权项

1. A method for forming a ceramic coating layer having increased plasma resistance, the method comprising:
receiving ceramic powder including multiple ceramic powder grains having a ceramic powder grain size scale from a powder supply unit and transporting the ceramic powder using a transporting gas; and allowing the transported ceramic powder to collide with a base material provided in a processing chamber at a speed of 100 to 500 m/s to then be pulverized and forming a ceramic coating layer having multiple first and second ceramic particles mixed therein, the multiple first ceramic particles having a first coating grain size and the second ceramic particles having a second coating grain size, wherein the first coating grain size of the first ceramic particles ranges from 200 nm to 900 nm, and the second coating grain size of the second ceramic particles ranges from 900 nm to 10 μm.