(DICHLOROTETRAMETHYL)DISILAZANE COMPOUND, METHOD OF ENHANCING ADHESIVE STRENGTH, AND METHOD OF FORMING PHOTORESIST PATTERN USING THE SAME,申请号KR20040003307-传众专利搜索

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发明名称	(DICHLOROTETRAMETHYL)DISILAZANE COMPOUND, METHOD OF ENHANCING ADHESIVE STRENGTH, AND METHOD OF FORMING PHOTORESIST PATTERN USING THE SAME
摘要
申请公布号	KR20050075917(A)	申请公布日期	2005.07.25
申请号	KR20040003307	申请日期	2004.01.16
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, KYOUNG MI;YOUN, YEU YOUNG;KIM, JAE HO;KIM, YOUNG HO;YI, SHI YONG
分类号	C07F7/10;C07F7/12;G03C1/492;G03F7/075;(IPC1-7):C07F7/12	主分类号	C07F7/10
代理机构		代理人
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