| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the following problems with a corrosion resistant member with a corrosion resistant film formed by a thermal spraying method on the surface of a substrate composed of a sintered ceramic compact to be exposed to the atmosphere of corrosive gases of a fluorine system, chlorine system, etc., and their plasmas; the corrosive gases and their plasmas intrude into the substrate from the defects and pores existing in the corrosion resistant film and the substrate is corroded. <P>SOLUTION: The corrosion resistant member has at least one layer of the corrosion resistant film formed on the surface of the substrate made of ceramics or a metal. At least one layer of the corrosion resistant film has a thermally sprayed corrosion resistant film composed of a group 3 element compound as a principal component and contains 0.001 to 3 mass%, in terms of an oxide, of at least either of Al or Si and the average crystal grain size is 0.5 to 10 μm. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
