| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas concentration sensor capable of detecting the gas concentration continuously even if a crack is generated. <P>SOLUTION: This gas concentration sensor 10 is equipped with an element part 20. The element part 20 includes a solid electrolyte substrate 1, atmospheric poles 2, 4, electrodes 3, 5, a diffusion rate determining layer 6, a ceramic board 7, a heater 8, and lead wires 9, 11-13. The atmospheric poles 2, 4 and the electrodes 3, 5 are formed on one main surface 1A and the opposite surface 1B of the solid electrolyte substrate 1 respectively. The lead wires 9, 11 are disposed along the circumference of the gas concentration sensor 10, and connected to the atmospheric poles 2 and the electrodes 3 respectively. The lead wires 12, 13 are disposed on the center part of the gas concentration sensor 10, and connected to the atmospheric poles 4 and the electrodes 5 respectively. The diffusion rate determining layer 6 is disposed in contact with the opposite surface 1B of the solid electrolyte substrate 1, and the ceramic board 7 is disposed so as to form a space 14 between the solid electrolyte substrate 1 and the atmospheric poles 2, 4. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
