ANTI-REFLECTIVE COATING COMPOSITION, MULTILAYER PHOTORESIST MATERIAL USING THE SAME, AND METHOD FOR FORMING PATTERN,申请号KR20010069244-传众专利搜索

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发明名称	ANTI-REFLECTIVE COATING COMPOSITION, MULTILAYER PHOTORESIST MATERIAL USING THE SAME, AND METHOD FOR FORMING PATTERN
摘要
申请公布号	KR100517038(B1)	申请公布日期	2005.09.26
申请号	KR20010069244	申请日期	2001.11.07
申请人		发明人
分类号	G03F7/004;G03F7/09;C09D179/02;G02B1/11;G03F7/11;H01L21/027;(IPC1-7):G03F7/09	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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