发明名称 Method for forming a semiconductor device structure a semiconductor layer
摘要 A method for providing gates of transistors with at least two different work functions utilizes a silicidation of two different metals at different times, silicidation for one gate and polysilicon for the other, or silicidation using a single metal with two differently doped silicon structures. Thus the problem associated with performing silicidation of two different metals at the same time is avoided. If the two metals have significantly different silicidation temperatures, the one with the lower temperature silicidation will likely have significantly degraded performance as a result of having to also experience the higher temperature required to achieve silicidation with the other metal.
申请公布号 US6949455(B2) 申请公布日期 2005.09.27
申请号 US20030677070 申请日期 2003.10.01
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 PHAM DANIEL THANH-KHAC;NGUYEN BICH-YEN;SCHAEFFER JAMES K.;ZAVALA MELISSA O.;STRAUB SHERRY G.;REID KIMBERLY G.;ROSSOW MARC;GEREN JAMES P.
分类号 H01L21/28;H01L21/8238;H01L29/49;H01L29/51;(IPC1-7):H01L21/320 主分类号 H01L21/28
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