| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation sensitive composition forming a resin film excellent in sensitivity to radiation and excellent also in uniformity of film thickness, rough part planarizing property, heat-resistant shape retentivity and dielectric characteristics, and to provide a laminate obtained by stacking on a substrate a resin film comprising the radiation sensitive composition, uniform in coating film thickness, and excellent in rough part planarizing property. <P>SOLUTION: The radiation sensitive composition comprises a cycloolefin-base polymer having a protonic polar group, a crosslinking agent, a radiation sensitive compound and a solvent, wherein the crosslinking agent is a polyfunctional epoxy compound having ≥3 epoxy groups and the solvent is a mixed solvent consisting of a polyalkylene glycol compound and a nitrogen-containing solvent. The laminate consists of the substrate and the resin film formed thereon using the radiation sensitive composition. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
