发明名称 Membrane and method for the production of the same
摘要 In a method for producing a membrane for a device, e.g. a microphone, first, a substrate is provided, whereon a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sacrificial layer facing away from the counter electrode is structured to form a plurality of recesses in the surface to define one or several antistick elements and one or several corrugation grooves at the same time. Subsequently, a membrane material is deposited on the structured surface of the sacrificial layer. Then, the sacrificial layer is removed to form the membrane, which has one or several corrugation grooves and one or several antistick elements.
申请公布号 US2005241944(A1) 申请公布日期 2005.11.03
申请号 US20050104396 申请日期 2005.04.11
申请人 INFINEON TECHNOLOGIES AG 发明人 DEHE ALFONS;BARZEN STEFAN;FUELDNER MARC
分类号 B81B3/00;H04R19/00;H04R31/00;(IPC1-7):C25D1/08;C25D5/00;C25D17/00 主分类号 B81B3/00
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