发明名称 VIBRATION ACTUATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration actuator ensuring stabilized drive characteristics regardless of a temperature variation. <P>SOLUTION: On the inner diameter side of a rotor 4 touching a stator 3, a low thermal expansion coefficient portion 41a having a thermal expansion coefficient lower than that of a rotor parent material 41 is provided. When the low thermal expansion coefficient portion 41a is provided, the sliding face 42a of the rotor 4 can direct radially outward or inward depending on a temperature variation and can sustain a parallel contact state with the sliding face 31a of the stator 3 resulting in stabilized drive characteristics regardless of a temperature variation. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005328582(A) 申请公布日期 2005.11.24
申请号 JP20040141845 申请日期 2004.05.12
申请人 NIKON CORP 发明人 SUMITOMO YOSHIKO
分类号 H02N2/00 主分类号 H02N2/00
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