发明名称 NEW LADDER TYPE SILICONE COPOLYMER
摘要 <P>PROBLEM TO BE SOLVED: To provide a new ladder type silicone copolymer which can be dissolved in organic solvents, can simply be coated by conventional spin coating methods, has good storage stability, and is suitably used as a resin component of a composition for forming anti-reflection films having adjustable anti-reflection abilities by the introduction of radiation-absorbing chromophoric groups. <P>SOLUTION: This ladder type silicone copolymer is characterized by comprising (A) (hydroxyphenylalkyl)silsesquioxane units and (B) alkylsilsesquioxane units. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005336497(A) 申请公布日期 2005.12.08
申请号 JP20050175396 申请日期 2005.06.15
申请人 TOKYO OHKA KOGYO CO LTD 发明人 HIRAYAMA HIROSHI;YAMADA TOMOTAKA;KAWANA DAISUKE;TAMURA KOKI;SATO KAZUFUMI
分类号 G03F7/075;C08G77/16;G03F7/11;H01L21/027 主分类号 G03F7/075
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