发明名称 Method and apparatus for alignment of a precision optical assembly
摘要 Interferometric apparatus and methods for assembling and measuring highly precise optical assemblies such as triple corner cubes, and the like. The apparatus and methods use one or more interferometers that can simultaneously measure the shape, orientation, and distance to one or more surfaces.
申请公布号 US6977730(B2) 申请公布日期 2005.12.20
申请号 US20040919726 申请日期 2004.08.17
申请人 ZYGO CORPORATION 发明人 EVANS CHRISTOPER JAMES
分类号 G01B9/02;G02B5/122;(IPC1-7):G01B9/02 主分类号 G01B9/02
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