发明名称 Electronic device
摘要 One embodiment of a method of making an electronic device includes forming on a substrate surface a first layer having a peak-valley-peak profile, and forming a second layer on the first layer by use of a target positioned along a line-of-sight that excludes a floor of the valley such that the second layer is not formed on the floor of said peak-valley-peak profile.
申请公布号 US2005287805(A1) 申请公布日期 2005.12.29
申请号 US20040880299 申请日期 2004.06.28
申请人 BETRABET CHINMAY S 发明人 BETRABET CHINMAY S.
分类号 H01L21/02;H01L21/285;H01L21/44;H01L29/786;(IPC1-7):H01L21/44 主分类号 H01L21/02
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