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发明名称
磁控溅镀装置、圆柱状阴极及涂布薄多重元件膜于一基底上之方法
摘要
本发明提供一种磁控溅镀装置,特别是包括至少一真空舱,并可利用磁控共同溅镀装置于基底上涂布多重成分膜;此装置具有沿纵轴旋转之嵌入圆柱型阴极(1,1’),更包括配置于圆柱型阴极(1,1’)内之磁性系统。圆柱型阴极(1,1’)包括至少具不同靶材之二区域(2,2’,3,3’,4,4’,5,5’)。此外,本发明亦提供在真空涂布系统中利用磁控共同溅镀技术于基底上涂布多重成分膜之方法。
申请公布号
TW200606995
申请公布日期
2006.02.16
申请号
TW094117042
申请日期
2005.05.25
申请人
应用影片有限两合公司
发明人
麦可 莱尔
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
洪澄文
主权项
地址
德国
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