发明名称 UNIFORM CAVITATION FOR PARTICLE REMOVAL
摘要 Systems and methods for promoting a substantially uniform cavitation field. With system (100) including a diaphragm (109) dividing a container (103), a second energy pulse corresponding to a first energy pulse arising from collapse of a cavity C is produced and is used to determine whether to adjust a corresponding transducer 121-k. In system (16), a cavity creating unit (11), including an assembly of transducers 15-i, is moveable from a test liquid to a particle removal (PR) liquid after transducer testing. In another system, a sensor plate (170) having an array of sensors 171-j provides a virtual wafer. A substantially uniform field of cavitation may be maintained by a cavity enhancement liquid, or adjustment of transducer energy. Mechanisms of holding an object produce substantially uniform cavitation. Opposed transducers in a container having monotonically decreasing and/or increasing cavitation density produce substantially uniform cavitation density.
申请公布号 KR20060017639(A) 申请公布日期 2006.02.24
申请号 KR20057023704 申请日期 2004.06.03
申请人 SEZ AG 发明人 FERRELL GARY W.;SCHIPPER JOHN F.;RATRA JAGJIT S.
分类号 H01L21/304;B08B3/12;H01L21/00 主分类号 H01L21/304
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