| 摘要 |
A substrate chuck is provided to facilitate a manufacture and an operation by driving a jig by using a magnetic force generated in an electromagnet. A substrate chuck includes a base(10), a jig(20), an adhesion layer(30), a first electromagnet(40), and a second electromagnet(50). The base has a shape of the substrate chuck and a concave unit(12) for mounting the jig, the adhesion layer, the first electromagnet, and the second electromagnet. The jig is installed to move in the concave part. The adhesion layer is mounted on the surface of the jig. The substrate is repetitively adhered. The first electromagnet is mounted in the rear side of the jig. The second electromagnet is installed in the concave unit while being fixed in the opposite side to the jig and has the polarity of the same direction as the first electromagnet.
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