发明名称
摘要 <p>&lt;P&gt;PROBLEM TO BE SOLVED: To provide a precision member storage container having less out gas and less adhesion of the particle caused by static electricity. Ž&lt;P&gt;SOLUTION: As for thermoplastic resin 100 mass parts, the precision member consists of conductive resin which contains 1-10 mass parts content of the conductive compound. As for the conductive resin, when it is left as it is at 80&deg;C for 60 minutes, the total generating gas volume of the volatile organic gas which carries out thermal desorption is 0.3 ppm or less, and surface resistance values are 10&lt;SP&gt;3&lt;/SP&gt;-10&lt;SP&gt;8&lt;/SP&gt;ohm. The thermoplastic resin is polycarbonate resin of viscosity average molecular weights 10,000-30,000. The conductive compound is carbon black whose DBP oil absorption is 300 cm&lt;SP&gt;3&lt;/SP&gt;/100 g or more, and whose BET specific surface area is 500 m&lt;SP&gt;2&lt;/SP&gt;/g or more. As for the polycarbonate resin, when a pellet 2g is put into 100 ml of ultrapure water, and heated at 50&deg;C for three hours, the total amount of the elution liquid concentration of the eluted ion is 8 ppb or less. As for the polycarbonate resin, it is preferable that the amount of addition of stabilizer and a release agent is 500 ppm or less. Ž&lt;P&gt;COPYRIGHT: (C)2007,JPO&INPIT Ž</p>
申请公布号 JP4324944(B2) 申请公布日期 2009.09.02
申请号 JP20050190129 申请日期 2005.06.29
申请人 发明人
分类号 H01L21/673;B65D85/86;G03F1/64 主分类号 H01L21/673
代理机构 代理人
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