发明名称 RECORDING DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a recording device which has a small area and is inexpensive, and to provide a manufacturing method of the recording device.SOLUTION: A recording device includes: a first wiring layer 120; a second wiring layer 130 provided above the first wiring layer; a third wiring layer 160 provided above the second wiring layer; a first insulation film 170 provided on the third wiring layer; a first contact 150 provided on the first wiring layer and below the third wiring layer, the first contact including an upper part electrically connected with the third wiring layer and a lower part electrically connected with the first wiring layer; a second contact 140 provided on the first wiring layer, the second contact including a side surface electrically connected with the second wiring layer and a lower part electrically connected with the first wiring layer. An upper surface of the second contact is lower than an upper surface of the first contact. The first insulation film is provided immediately above the second contact.SELECTED DRAWING: Figure 5
申请公布号 JP2016178195(A) 申请公布日期 2016.10.06
申请号 JP20150056980 申请日期 2015.03.19
申请人 TOSHIBA CORP 发明人 KOBAYASHI YUSUKE
分类号 H01L27/105;H01L21/768;H01L21/8246;H01L23/522;H01L27/10;H01L45/00;H01L49/00 主分类号 H01L27/105
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