Thermal radiation sensors - supported on anodically formed oxide film,prodn

摘要

A metal blank is anodically oxidised and metal removed from an area to leave an exposed oxide layer integral with the blank and supported over the entire periphery by the blank; a thermocouple junction is then deposited on the oxide film. The blank is pref. of Al, while the thermocouple may be semiconductive materials, vapour deposited in partially overlapping layers, the junctions possibly being subsequently coated with a radiation absorbing material. A number of junctions may be provided to form a thermopile.