发明名称 Zone melter - esp for semiconductor material bars using outer short circuiting ring
摘要 <p>A conventional flat single or multi turn induction coil, with coolant circulation is used and the inside dia. of the short circuiting ring(s) is greater than the outside dia. of the coil. The ring may be coplanar with the coil or >=1 may be placed above and/or below the plane of the coil. The ring(s) are moveable axially independent of the coil and have independent cooling. Accurate control of temp. profile within and next to molten zone is achieved improving product quality.</p>
申请公布号 DE2227750(A1) 申请公布日期 1973.12.20
申请号 DE19722227750 申请日期 1972.06.07
申请人 SIEMENS AG, 1000 BERLIN U. 8000 MUENCHEN 发明人 KELLER, WOLFGANG, DR., 8000 MUENCHEN
分类号 H05B6/30;C01B33/02;C30B13/20;H01L21/208;(IPC1-7):01J17/08 主分类号 H05B6/30
代理机构 代理人
主权项
地址