发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device excellent in durability; and provide a semiconductor device manufacturing method.SOLUTION: According to an embodiment, a semiconductor light emitting device has a semiconductor substrate, and an insulation film and a conductive film which are provided above the semiconductor substrate. The insulation film has: a plurality of first particles having a periodic structure; a plurality of second particles having an average particle diameter smaller than an average particle diameter of the first particles; and fillers provided among either of the plurality of first particles or among the plurality of second particles.SELECTED DRAWING: Figure 1
申请公布号 JP2016174052(A) 申请公布日期 2016.09.29
申请号 JP20150052710 申请日期 2015.03.16
申请人 TOSHIBA CORP 发明人 NAKAZAWA HIROSUKE
分类号 H01L21/768;H01L21/316;H01L23/532 主分类号 H01L21/768
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