Locally heated multi-zone substrate support

摘要

Embodiments of the present disclosure provide an electrostatic chuck (ESC) having azimuthal temperature control. In one embodiment, the electrostatic chuck includes an insulating base, a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface, an electrode assembly disposed between the insulating base and the substrate supporting surface, and a plurality of heating elements coupled to the insulating base, the heating elements azimuthally control a temperature profile across a substrate surface.

主权项

1. An electrostatic chuck, comprising:
an insulating base; a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface; an electrode assembly disposed between the insulating base and the substrate supporting surface; and a plurality of heating elements coupled to the insulating base, wherein the plurality of heating elements are formed on a backside surface of the insulating base, and the heating elements are arranged in independently controllable groups of at least one or more heating elements to azimuthally control a temperature profile across a substrate surface.