| 发明名称 | Pixelated capacitance controlled ESC | ||
| 摘要 | Implementations described herein provide a pixilated electrostatic chuck which enables both lateral and azimuthal tuning of the RF coupling between an electrostatic chuck and a substrate placed thereon. In one embodiment, the pixilated electrostatic chuck (ESC) may include a dielectric body having a workpiece support surface configured to accept a substrate thereon, one or more chucking electrodes disposed in the pixilated ESC, and a plurality of pixel electrodes. The plurality of pixel electrodes are switchable between a floating state and a grounded state, having variable capacitance to ground, or both. The pixel electrodes and the chucking electrodes form a circuit operable to electrostatically chuck the substrate to the workpiece support surface. | ||
| 申请公布号 | US9472410(B2) | 申请公布日期 | 2016.10.18 |
| 申请号 | US201414276790 | 申请日期 | 2014.05.13 |
| 申请人 | APPLIED MATERIALS, INC. | 发明人 | Sadjadi Reza;Boyd, Jr. Wendell Glen;Parkhe Vijay D.;Noginov Maxim Mikhailovich |
| 分类号 | H01L21/683;H01T23/00;H01L21/285;H04N7/18;C23C16/00;H01J37/32;H01L21/02;H01L21/265;H01L21/3065;H01L21/311;H01L21/3213;G06K9/00 | 主分类号 | H01L21/683 |
| 代理机构 | Patterson & Sheridan, LLP | 代理人 | Patterson & Sheridan, LLP |
| 主权项 | 1. A pixilated electrostatic chuck (ESC), comprising: a dielectric body having a workpiece support surface configured to accept a substrate thereon; one or more chucking electrodes disposed in the pixilated ESC; and a plurality of pixel electrodes switchable between a floating state and a grounded state, having variable capacitance to ground, or both, the pixel electrodes and chucking electrodes forming a circuit operable to electrostatically chuck the substrate to the workpiece support surface. | ||
| 地址 | Santa Clara CA US | ||