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发明名称
摘要
申请公布号
JPS5028316(B1)
申请公布日期
1975.09.13
申请号
JP19710009567
申请日期
1971.02.25
申请人
发明人
分类号
H01L21/306;H01L21/44;(IPC1-7):H01L21/44;H01L21/30
主分类号
H01L21/306
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代理人
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