NOVEL CYCLODISILAZANE DERIVATIVE, METHOD FOR PREPARING THE SAME AND SILICON-CONTAINING THIN FILM USING THE SAME

摘要

Provided are a novel cyclodisilazane derivative, a method for preparing the same, and a silicon-containing thin film using the same, wherein the cyclodisilazane derivative having thermal stability, high volatility, and high reactivity and being present in a liquid state at room temperature and under a pressure where handling is easy, may form a high purity silicon-containing thin film having excellent physical and electrical properties by various deposition methods.

主权项

1. A cyclodisilazane derivative represented by the following Chemical Formula 1: in Chemical Formula 1, R1 to R3 are each independently hydrogen, halogen, (C1-C5)alkyl or (C2-C5)alkenyl, and R4 is hydrogen, (C1-C3)alkyl or (C2-C5)alkenyl.