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发明名称
JOCHAKUHOHOTO JOCHAKUSOCHI
摘要
申请公布号
JPS5161486(A)
申请公布日期
1976.05.28
申请号
JP19740135485
申请日期
1974.11.27
申请人
HITACHI LTD
发明人
NAGASHIMA NAOYUKI
分类号
C23C14/24;C23C14/28;H01L21/285;H01L21/441
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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