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发明名称
KETSUSHOSEICHOHO
摘要
申请公布号
JPS5194484(A)
申请公布日期
1976.08.19
申请号
JP19750019725
申请日期
1975.02.19
申请人
发明人
分类号
C30B19/00;H01L21/208
主分类号
C30B19/00
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代理人
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