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发明名称
ELECTRON BEAM VACUUM MACHINING DEVICE
摘要
申请公布号
JPS528596(A)
申请公布日期
1977.01.22
申请号
JP19760078833
申请日期
1976.07.01
申请人
SHIAKII SA
发明人
SHIYOOJI SAIEGI
分类号
H01J37/315;B23K15/06
主分类号
H01J37/315
代理机构
代理人
主权项
地址
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