发明名称 |
ELECTRONIC COMPONENT TRANSPORT DEVICE AND ELECTRONIC COMPONENT INSPECTION DEVICE |
摘要 |
Provided are an electronic component transport device and an electronic component inspection device for which inflow of outside air can be suppressed as much as possible when work is performed on the inside of the devices. The electronic component transport device is provided with: a first opening/closing part 4 that can open and close; a first turning support part 42 that turnably supports the first opening/closing part 4; a second opening/closing part 5 that is openably/closably provided to the first opening/closing part 4; and a second turning support part 52 that turnably supports the second opening/closing part 5. The area of the first opening/closing part 4 is larger than the area of the second opening/closing part 5. |
申请公布号 |
WO2016147533(A1) |
申请公布日期 |
2016.09.22 |
申请号 |
WO2016JP00565 |
申请日期 |
2016.02.03 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KIRIHARA, Daisuke;MAEDA, Masami;SHIMOJIMA, Toshioki;YAMAZAKI, Takashi |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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