Textured membrane for a multi-chamber carrier head

摘要

A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

主权项

1. A flexible membrane for a carrier head of a chemical mechanical polishing system, comprising:
a generally circular main portion with an upper surface and a lower surface to provide a mounting surface for a substrate; and an annular flap extending from the main portion on a side opposite the lower surface, wherein the annular flap includes
a lip portion to be clamped to the base assembly and having a first surface, anda second portion extending between the lip portion and the circular main portion, at least one side of the second portion having a second surface with a surface texture, wherein the first surface of the lip portion is smoother than the second surface of the second portion.