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发明名称
VERFAHREN UND VORRICHTUNG ZUM AUSRICHTEN EINES MASKENMUSTERS IN BEZUG AUF EIN SUBSTRAT
摘要
申请公布号
DE2651430(A1)
申请公布日期
1977.12.29
申请号
DE19762651430
申请日期
1976.11.11
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
BOUWHUIS,GIJSBERTUS;FRANCISCUS LAMBOO,THEODORUS
分类号
H01L21/30;G02B27/18;G03F9/00;H01L21/027;(IPC1-7):G02B27/00;H01F10/00;H01L21/68;G11C5/00
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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