Vibrating reed, angular velocity sensor, electronic device, and moving object

摘要

The vibrating reed includes a first main surface and a second main surface that face each other in the thickness direction of a piezoelectric body and a detection unit that vibrates along the thickness direction when detecting. The detection unit includes a groove of which a groove bottom is positioned at a position beyond a midline between the first main surface and the second main surface in the depth direction from an opening formed in the first main surface, an inside surface electrode that is formed on an inside surface facing the inside of the groove, an outside surface electrode that is formed on an outside surface which is opposite the inside surface with the piezoelectric body interposed there between, and a pair of groove bottom electrodes that is provided further on the groove bottom at an interval than the midline and face inside the groove.

主权项

1. A vibrating reed comprising:
a first main surface and a second main surface of a piezoelectric body, the second main surface being on a back surface of the piezoelectric body with respect to the first main surface; an outside surface that connects the first main surface and the second main surface; and a detection unit that vibrates along a direction intersecting the first main surface, wherein the detection unit includes
a groove of which a groove bottom is at a position beyond a midline between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface,an inside surface electrode that is provided on an inside surface facing the inside of the groove,an outside surface electrode that is provided on the outside surface, anda pair of groove bottom electrodes that are provided further on the groove bottom side than the midline at an interval and face each other inside the groove.