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发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPS5390033(A)
申请公布日期
1978.08.08
申请号
JP19770003957
申请日期
1977.01.19
申请人
HITACHI LTD
发明人
AKIBA MASAKUNI;NAGATOMO HIROTO
分类号
H05B3/62;C23C16/46;F27D11/02;H01L21/02;H01L21/22;H05B3/64
主分类号
H05B3/62
代理机构
代理人
主权项
地址
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