发明名称 NANO-LAYERED COATING FOR HIGH-QUALITY TOOLS
摘要 FIELD: tools.SUBSTANCE: invention relates to cutting tool nano-layered coating and method of its application on cutting tool. Performing application of coating on cutting tool surface containing nano-structure from alternating nano-layers A consisting of (Al,Ti,W)N, and nano-layers B consisting of (Ti,Si,W)N. For application of nano-layered structure at least one arc evaporation source is used. Said nano-structure is applied from alternating nano-layers A, having elementary composition, set by formula (AlTiW)N with 0,50 ≤ x ≤ 0.65 and 0 ≤ y ≤ 0.10, wherein factors preset as x, 1-x-y and y, correspond to aluminium, titanium and tungsten nuclear concentration, respectively, and nano-layers B having element composition, preset by formula (TiSiW)N with 0.05 ≤ z ≤ 0.30 and 0 ≤ u ≤ 0.10, wherein factors specified as 1-z-u, z and u, correspond to titanium, silicon and tungsten nuclear concentration, respectively. For quantitative determination of elements in said layer A only said aluminium, titanium and tungsten are considered. For quantitative determination of elements in said layer B only said titanium, silicon and tungsten are considered. Said at least one arc evaporation source comprises magnetic device for creation of magnetic fields on target surface and above it provided on target. Said magnetic device contains extreme permanent magnets, central permanent magnet and at least, one circular coil arranged behind target, which internal diameter, defined by windings is less than or equal to target diameter, wherein during nano-layered structure application extreme permanent magnets are located at distance of 6-10 mm from target. Extreme permanent magnets projection on target surface is located farther from target surface midpoint in comparison with circular coil projection on target surface, and central permanent magnet is located behind target.EFFECT: enabling coating for high-quality cutting tool, providing better performance compared with cutting tool, from known state of the art.14 cl, 8 dwg, 1 tbl, 5 ex
申请公布号 RU2602577(C2) 申请公布日期 2016.11.20
申请号 RU20140102998 申请日期 2012.06.25
申请人 ERLIKON SERFIZ SOLJUSHNZ AG, PFEFFIKON 发明人 ARNDT, Mirjam
分类号 C23C14/06;B82Y30/00;C23C14/35 主分类号 C23C14/06
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