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发明名称
INTERFEROMETER DEVICE
摘要
申请公布号
JPS5413365(A)
申请公布日期
1979.01.31
申请号
JP19780059032
申请日期
1978.05.19
申请人
IBM
发明人
MIRAADO ARUBIN HABAGAA
分类号
G01B11/06;G01N17/00
主分类号
G01B11/06
代理机构
代理人
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地址
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