Test head for electrical testing of a test specimen

摘要

The present disclosure relates to a test head for electrical testing of a test specimen, in particular a wafer, having at least two guide plates, which are spaced apart by means of at least one spacer and have guide holes distributed over the surfaces thereof, in which test contact pins for physical contact with the test specimen are guided in a sliding manner. Provision is made for the spacer to be formed by a multiplicity of point supports arranged in a manner distributed over the surfaces of the guide plates and secured on the guide plates.

主权项

1. A test head for electrical testing of a test specimen, said test head comprising:
at least two guide plates spaced apart by at least one spacer and having guide holes distributed over the surfaces of the guide plates; and test contact pins for physical contact with the test specimen, the test contact pins guided in a sliding manner in the guide holes, wherein the at least one spacer is formed by a multiplicity of point supports arranged in a manner distributed over the surfaces of the guide plates and secured on the guide plates, wherein each of the point supports has at least one cross section weakening zone having lower mechanical strength, the at least one cross section weakening zone having a recess with a longest dimension along a longitudinal direction of the point supports, and wherein the point supports are arranged so as to be rotationally oriented over the surfaces of the guide plates in such a way that the effective directions of lower mechanical strength are at least one of aligned with the center of the respective guide plate and aligned approximately with the center of the respective guide plate.