发明名称 Ultra-compact, passive, varactor-based wireless sensor using quantum capacitance effect in graphene
摘要 An electrical device includes at least one graphene quantum capacitance varactor. In some examples, the graphene quantum capacitance varactor includes an insulator layer, a graphene layer disposed on the insulator layer, a dielectric layer disposed on the graphene layer, a gate electrode formed on the dielectric layer, and at least one contact electrode disposed on the graphene layer and making electrical contact with the graphene layer. In other examples, the graphene quantum capacitance varactor includes an insulator layer, a gate electrode recessed in the insulator layer, a dielectric layer formed on the gate electrode, a graphene layer formed on the dielectric layer, wherein the graphene layer comprises an exposed surface opposite the dielectric layer, and at least one contact electrode formed on the graphene layer and making electrical contact with the graphene layer.
申请公布号 US9513244(B2) 申请公布日期 2016.12.06
申请号 US201214111753 申请日期 2012.04.13
申请人 Regents of the University of Minnesota 发明人 Koester Steven J.
分类号 H01L21/20;G01N27/22;H01L29/10;H01L29/16;H01L29/423;H01L29/93;H01L31/08;H01L31/115;G01R27/26 主分类号 H01L21/20
代理机构 Shumaker & Sieffert, P.A. 代理人 Shumaker & Sieffert, P.A.
主权项 1. A sensor comprising: a graphene quantum capacitance varactor having a graphene layer, wherein capacitance of the graphene layer changes in response to electrical charge collected proximate to the graphene layer; and a readout circuit responsive to the capacitance of the graphene layer and configured to output a signal indicative of the electrical charge.
地址 Minneapolis MN US