发明名称 METHOD AND APPARATUS FOR CLEANING SLAB-SHAPED OBJECTS
摘要 In cleaning plate-shaped objects a tub is filled with a cleaning liquid and contains a plurality of troughs mounting brushes for cleaning the objects. At least some of the brushes are arranged in pairs, with each brush of a pair rotating in the opposite direction. The plate-shaped objects are conveyed across and above the tub and the brushes are arranged so that the periphery of each brush extends above the top of the tub and contacts the objects to clean them. By rotating each brush of a pair in opposite directions, a meniscus of cleaning liquid is formed between them that contacts the objects and aids in cleaning them.
申请公布号 HU173940(B) 申请公布日期 1979.09.28
申请号 HU1974UE00052 申请日期 1974.08.06
申请人 UDDEHOLMS AG,SE 发明人 HOLM,KURT A.,SE
分类号 B08B7/04;H01L21/304;H05K3/26 主分类号 B08B7/04
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