发明名称 Vapour deposition appts. evaporator boat and lid - with matching sloping faces and spring clip action connection together with lugs for direct resistance heating
摘要 <p>The rectangular boat has two narrow sides, and the top of each of these sides is bent outwards and downwards to form two sloping zones, each leading to a horizontal connecting lug. The lid consists of an inverted "U" with two legs extending downwards on the long sides of the boat, whereas the flat top of the inverted "U" is perforaged. The two narrow ends of the top of the lid each end in a sloping zone fitting on top of the two sloping zones where the lugs join the boat. Each leg of the lid ends in a V-bend so the lid fits on the boat in the manner of a spring clip. Two sloping zones are pref. at 15-45 degrees w.r.t. the horizontal. The lid is securely fixed on top of the boat, and is also connected to the lugs used for direct electric resistance heating of the boat. This means that the lid is uniformly heated so that no vapour from the material being evaporated condenses on the lid.</p>
申请公布号 DE2822130(A1) 申请公布日期 1979.11.22
申请号 DE19782822130 申请日期 1978.05.20
申请人 LEYBOLD-HERAEUS GMBH 发明人 KIENEL,GERHARD,DR.-PHYS.;KUBACHA,KARL-HEINZ
分类号 C23C14/24;(IPC1-7):C23C13/12 主分类号 C23C14/24
代理机构 代理人
主权项
地址