EVALUATION OF SEMICONDUCTOR INTEGRATED CIRCUIT,申请号JP19780123029-传众专利搜索

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发明名称	EVALUATION OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号	JPS5548947(A)	申请公布日期	1980.04.08
申请号	JP19780123029	申请日期	1978.10.05
申请人	TOKYO SHIBAURA ELECTRIC CO	发明人	TAGUCHI MINORU;FURUKAWA AKIHIKO;SASAKI HAJIME;KANZAKI KOUICHI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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