| 摘要 |
Method and apparatus for thermoacoustic or thermal wave microscopy to detect surface and subsurface information from a material on a microscopic scale. A thermal wave is generated in a material by causing periodic, localized heating at a microscopic spot by focusing intensity modulated light, or electromagnetic radiation or particle beam, on the spot. The thermoacoustic signal produced provides information about material composition, structure, and the presence of energy deexcitation processes such as fluorescence, photochemistry and photovoltaic processes. The sample is scanned as a two-dimensional array of microscopic spots. Full depth-profiling of the material is provided by varying the modulation frequency of the energy source.
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