发明名称 PREPARATION OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To increase the strength of the substrate, by making grooves around the part from within which the semiconductor chips are obtained in a manner that the groove does not border on the neighboring ones. CONSTITUTION:With the usual size and arrangement of the part 3, the circular groove 2a is prepared around it so that it does not border on the neighboring circular groove. In this manner the substrate does not break during the preparation and the better yield can be obtained in the form of hexagonal chips by cutting the line 4 after the preparation finished.</p>
申请公布号 JPS5698840(A) 申请公布日期 1981.08.08
申请号 JP19800000994 申请日期 1980.01.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAJIMA TOSHIHIRO
分类号 H01L21/301;H01L29/06 主分类号 H01L21/301
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