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发明名称
TORANJISUTADEBAISU
摘要
申请公布号
JPS5753975(A)
申请公布日期
1982.03.31
申请号
JP19810121767
申请日期
1981.08.03
申请人
SIEMENS AG
发明人
UORUFUGANGU UERUNAA
分类号
H01L21/331;H01L21/74;H01L29/08;H01L29/73;H01L29/808
主分类号
H01L21/331
代理机构
代理人
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地址
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