摘要 |
<p>PURPOSE:To miniaturize a humidity sensitive element, to reduce a heat loss at a heating time, and to simplify a manufacturing process, by a method wherein a humidity snsitive ceramic layer is coiled around a cylindrical resistant heating substance, and a conductive electrode layer is formed on the surface of the ceramic layer to secure them into a monolithical unity. CONSTITUTION:A humidity sensitive element 11, formed into a direct heat type, is constituted such that a heat resistant core rod 12, a humidity sensitive ceramic 13, and a conductive electrode layer are burned and hardened into a monolithical unity, a lead wire 15 is installed in a given position of a conductive electrode layer 14, and a heater 16, working a resistant heating wire, is positioned in a spiral between the heat resistant core rod 12 and the humidity sensitive ceramic 13. In case a humidity in atmosphere is measured using the humidity element 11 so constituted, it is measured through the lead wire 15 located in a given position of the conductive electrode layer 14 and the wire for the heater 16. Contaminants on the surface of the humidity sensitive element 11 exposed to the air are removed by heating the humidity sensitive element itself to a given temperature through energizing of the heater 16 with a high current, and this permits the restoration of a humidity property.</p> |