摘要 |
PURPOSE:To determine an irradiation position of X-ray and to perform a two- dimentional evaluation of a large-diametered crystal, by providing an X-ray irradiation position detecting mechanism which leads a light, asymmetrically reflected by a monochrometer crystal surface, onto an X-ray optical axis and irradiates the surface of a sample crystal with said light. CONSTITUTION:After an X-ray, produced from an X-ray focus 1, passes through a slit 2 and is formed into a monochrome by a monochrometer crystal 4, it passes through a slit 9 to enter a sample crystal 10. An X-ray 13 is asymmetrically reflected by the monochrometer crystal 4, and an X-ray, entering the sample crystal 10, is formed into an incident X-ray 14. Meanwhile, a visual light 15, emitted from a light source 6, is led to a light axis of an X-ray which is emitted from the X-ray focus 10 and advances, in order, to 1 Q C. This causes coinciding of an X-ray irradiation position C of the sample crystal 10 with the irradiation position of the visual light, permits determination of the irradiation position of the X-ray through the visual and direct detection of a light scattered from a point C, and permits the two-dimentional evaluation of a large- diametered crystal. |