| 摘要 |
An apparatus with a vacuum system, said vacuum system including a vacuum chamber adapted to contain main instruments of the apparatus, and an exhaust device adapted to exhaust air from the vacuum chamber, which apparatus comprises a structure for vibration isolation adapted to prevent the transmission of the vibration of the exhaust device to a main section of the apparatus, the exhaust device of the structure comprising a bellows connected with the vacuum chamber, an exhaust tube connected with the bellows and a vacuum pump attached to the exhaust tube; and the bellows, the exhaust tube and the vacuum pump are arranged to construct a pendulum system in which the bellows is adapted for a fulcrum, whereby the vibrations of the vacuum pump are absorbed by the pendulum system and do not reach the main section of the apparatus. Other structure for providing additional guidance and dampening of the pendulum system may also be provided.
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